沃骐智能装备(苏州)有限公司
真空晶圆搬运机器人晶圆搬运机械手，达谊恒机器人达谊恒晶圆机器人，半导体产品
达谊恒手臂
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参数详解 ※1
| 型号 Model | UTVW-R2800H | ||||||
| 机械手臂形状 Robot Type | 4轴圆坐标型 4 axis Cylindrical Coordinate | ||||||
动作范围 Operation Range |
X-axis | 680mm | |||||
| θ-axis | 330° | ||||||
| Z-axis | 50mm | ||||||
最大动作速度 Max. Operation Speed |
X, A-axis |
120°/sec | |||||
| θ-axis | 80°/sec | ||||||
| Z-axis | 37.5mm/sec | ||||||
| 分解能力 Resolution |
X, A-axis |
0.001mm/pulse or less | |||||
| θ-axis | 0.001°/pulse | ||||||
| Z-axis | 0.001mm/pulse | ||||||
| 往复位置精度 Repeatability | XYZ方向：各±0.1mm | ||||||
| 可搬运重量 Payload | 2kg (含手爪 including E/E) | ||||||
| 洁净度 Cleanliness | ISO Class 3 (ISO-14644) | ||||||
| 本体重量 Mass | 85kg | ||||||
| 必要设施 Facilities | 电源 Power | Single phase 200-220±10% VAC 3A | |||||
| 设置环境 Environment | 温度 Temperature | 15-40℃ (Atmosphere side)/15-80℃ (Vacuum Seal Unit) | |||||
| 湿度 Humidity | Atmospheric pressure ～ 10-6Pa | ||||||
