全椒亚格泰电子新材料科技有限公司
Technical specification
Trimethylsilane
| CAS-No:
|
993-07-7
|
| UN No:
|
3161
|
Chemical formula: (CH3)3 Si
Appearance:
Colorless gas with a slight odor, stable at room temperature and atmospheric pressure.
Type:
Electronic pure 5N
Stability and reactivity:
May decompose to silicon carbide and hydrogen at high temperatures (above 500 oC)
Composition:
| Substance name
|
Content
|
|
| Trimethylsilane
|
99,999
|
%
|
| Hydrocarbons total, not more
|
1
|
ppm
|
| Nitrogen, not more
|
1
|
ppm
|
| Chlorides total, not more
|
1
|
ppm
|
| Carbon dioxide, not more
|
1
|
ppm
|
| Oxygen Argon, not more
|
2
|
ppm
|
| Carbon monoxide, not more
|
2
|
ppm
|
| Water, not more
|
1
|
ppm
|
Physical properties (reference data):
| Molecular weight
|
74,20
|
g/mole
|
| Density at 20
|
0,638
|
kg/m3
|
| Melting point
|
-135,9
|
|
| Boiling point
|
6,7
|
|
| Freezing point
|
- 135,9
|
|
| Major Hazards
|
Flammable
|
|
Additional information (properties):
- Non corrosive;
- Non pyrophorus;
- Non radio-active;
- LC50 = 9600 ppm/1h
