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EGH-6210 / EGPS-6210
Energy Range: 1 keV to 60 keV
Beam Current: 10 μA to 5 mA
Spot size: 50 μm to 10 mm
Mounting: 2¾CF
Features/Options: Internal Alignment while Operating, Magnetostatic Focusing, Deflection, and Beam Shaping, Pulsing, Differential pumping
EGH-6002 / EGPS-6002
Energy Range: 1 keV to 50 keV
Beam Current: 10 nA to 100 μA
Spot size: 0.5 mm to 100 mm
Mounting: 4½CF or 6CF
Features/Options: Internal Alignment while Operating, Magnetostatic Focusing and Deflection, Magnetic Lens, Pulsing
EGF-6104 / EGPS-6104
Energy Range: 1 keV to 50 keV
Beam Current / Spot Size:
Standard: 10 nA to 200 μA / 15 mm to 50 mm
High Current: 10 nA to 1 mA / 15 mm to 50 mm
Mounting: 2¾CF
Features/Options: Adjustable Beam Alignment while Operating, Wide-Angle Uniform Beam, Divergence Control, Magnetostatic Deflection, Beam Washing, Custom Apertures, Dual Grid Pulsing
EGF-6115 / EGPS-6115
Energy Range: 1 keV to 50 keV
Beam Current: 10 nA to 5 mA
Spot Size: 10 mm to 500 mm
Mounting: 2¾CF
Features/Options: Internal Alignment while Operating, Electrostatic Focusing, Magnetostatic Deflection and Rastering
EGH-8100/ EGPS-8100
Energy Range: 1 keV to 100 keV
Beam Current: 10 nA to 1 mA (pulsed beam up to 20 mA)
Spot Size: 3 mm to 100 mm
System Mounting Flange: 6CF
Turbo Pump Mounting Flange: 4½CF
Gauge Mounting Flanges: (3) 2¾CF
Features/Options: Internal Alignment while Operating, Flood Beam, Pulsing, High Current Pulsing
EGH-8103 / EGPS-8103
Energy Range: 10 keV to 100keV
Beam Current / Spot Size:
Standard: 10 nA to 100 μA / Standard: 60 μm to 10 mm
High Current: 10 nA to 1 mA / High Current: 500 μm to 10 mm
Mounting: 6CF Mounted
Features/Options: Adjustable Alignment while Operating, Magnetostatic Focusing and Deflection, Magnetic Lens, Pulsing
EGH-8105 / EGPS-8105
Energy Range: 1 keV to 100 keV
Beam Current: 50 nA to 100 μA
Spot Size: 10 mm to 500+ mm
Mounting: 6CF
Features/Options: Adjustable Beam Alignment while Operating, Uniform Flood Beam, Beam Washing for Uniform Spot, Electrostatic Focusing, Magnetic Deflection, Pulsing, Rastering
EGH-8201 / EGPS-8201
Energy Range: 10 keV to 100 keV
Beam Current: 10 nA to 1 mA (pulsed to 20 mA)
Spot Size: 1 mm to 100 mm
Mounting: 6CF
Features/Options: Magnetostatic Focusing and Deflection, Pulsing, Differential Pumping, Internal Alignment while Operating
EGH-8202 / EGPS-8202
Energy Range: 10 keV to 100 keV
Beam Current: 10 nA to 1 mA (pulsed up to 20 mA)
Spot Size: 1 mm to 15 mm
Mounting: 6CF
Features/Options: Magnetostatic Focusing and Deflection (Two Lens System), Pulsing, Differential Pumping, Optional Gate Valve
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