BAG302 Medium to Ultra High Vacuum Gauge

INFICON 单 Bayard-Alpert 热电离真空计 BAG302 涵盖从 1.3 × 10^-9至 6.7×10^-2mbar（1 × 10^-9至 5 × 10^-2Torr）的广泛测量范围。紧凑型一体化热电离真空计 BAG302 能够轻松地更换双丝极传感器、内置 OLED 显示器、设定点继电器和对数线性模拟输出以及集成 RS485 数字接口，提高了集成灵活性。这些功能配以坚固的设计，使 BAG302 为其自身的基本压力测量仪器带来经济且可重复的过程，并提供高价值/低拥有成本的选择。

益处

• Wide measurement range from 1.3 × 10^-9to 6.7×10^-2mbar(1 × 10^-9to 5 × 10^-2Torr)
• Two standard long-life yttrium oxide coated iridium filaments
• All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
• Bright digital OLED display with keypad for simple setup, operation and programming
• User programmable set point relay
• User programmable display units in mbar, Torr or Pa
• User selectable Auto-ranging of emission current
• Mechanical strength and ruggedness
• Choice of various flange options
• Easy to exchange sensing element
• Compliance & standards: CE, RoHS
• 直接取代 Granville-Phillips^®354 Micro-Ion^®模块 – 包括软件命令在内的相同控制功能 (RS485)

  （Granville-Phillips^®和 Micro-Ion^®是 MKS Instruments, Andover, MA 的注册商标）

典型应用

• Pressure measurement in semiconductor process and transfer chambers
• Industrial coating
• General vacuum measurement and control in the low to ultra high vacuum range

  规格

  类型

  BAG302
  Messurement range		1.3 x 10-9... 6.7 x 10-2
  Accuracy (N2)
  1.3×10-8… 6.7 ×10-2mbar	% of reading	±15
  1×10-8… 5×10-2Torr	% of reading	±15
  Repeatability	% of reading	±5
  Degas
  p < 6.7 x 10-5	mbar	electron bombardment, 2 min (default)
  p < 5.00 x 10-5	Torr	(programmable between 2 ... 10 min)
  Temperature
  Operation (ambient)	°C	0 ... +40
  Storage	°C	-40 ... +70
  Bakeout at flange (sensor only, electrics removed)	°C	200
  Supply voltage	V (dc)	+20 ... +28
  Output signal analog	V	0 ... +9 (log-linear)
  Voltage vs. pressure	volts per decade	1
  Setpoint relay		1 (single-pole double-throw relay (SPDT)) 1 A at 30 V (dc) resistive, or V (ac) non-inductive
  Electrical connection		D-Sub, 9-pin, male for analog, D-Sub, 9-pin, female for RS485
  Interface (digital)		RS485
  Emission control		manual
  Filament		two Yt2O2coated Ir
  Filament status		display / digital output
  Digital functions		degas, filament on/off and emission control
  Materials exposed to vacuum		Yt2O3, Ir, W, Ta, stainless steel, glass, Ni
  Mounting orientation		any
  Internal volume	cm³ (in.³)	16.4 (1.0)
  Weight KF / CF		270